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ATF6

The ATF 6 Sensor is an automated tracking focus solution designed for precision microscopy applications that allows focusing servo systems to quickly and accurately determine the distance and direction to the best focus position. Leveraging advanced laser triangulation technology, it ensures rapid and accurate focus for both stationary and moving samples. ATF6 sensor integrates seamlessly with infinity-corrected microscope systems, delivering unparalleled focus reliability even on challenging surfaces like patterned samples.

Comparison: Product ATF6, ATF6.5 & PFA-LN

Autofocus SensorATF6ATF6.5PFA-LN
Structured Light PatternLine Segment
Wavelengths Available (nm)660785850680785450660785850
Power Output (mW)0.250.0210.0311.51.61.11.10.91.1
Laser ClassificationI3B3B3B3B3R3R3R3R
Maximum Standoff Distance200mm300mm300mm
Communication DifferencesRS232/RS422Gigabit Ethernet, RS485
Sampling RateUp to 1.7kHz (6.5kHz SWIFT Mode)Up to 3 kHz (5kHz SWIFT Mode)
Static Autofocus Repeatability± 1/3 Objective Depth of Field± 1/4 Objective Depth of Field
Fast Tracking Autofocus Repeatability± 1/2 Objective Depth of Field± 1/3 Objective Depth of Field

Features

  • Wide Capture Range: Achieves optimal performance with capture ranges up to ±3000 µm, ensuring flexibility across diverse microscopy setups.
  • Includes advanced features SWIFT, and supporting piezo Z-actuator (PZ) and WDI Z stages for enhanced functionality.
  • Available in 660 nm, 785nm, or 850nm.

Applications

  • The ATF6 sensor is the ideal solution for semiconductor, flat panel display, biomedical, and optical metrology microscopy imaging.