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Mitutoyo VMU and WDI MMS Integration

WDI designs and manufactures cutting-edge automated microscopes and precision components tailored for demanding inspection applications. By integrating Mitutoyo Video Microscope Unit (VMU), WDI has transformed existing imaging technology into an innovative microscopy automation solution. The native capabilities of Mitutoyo Video Microscope Unit (VMU) are now expanded by WDI’ integration of precision Z-stages, high-speed laser autofocus sensor, fast linear lens changers, and illuminator options.

 

 

 

 

Brochure (Coming Soon)

Features

  • High-precision motorized Z-stage: Integrated Z-axis enables smooth, programmable vertical movement with up to 40 nm resolution for precise, automated focus control.
  • Dynamic laser autofocus sensor: Tracks surface variations in real time, automatically adjusting focus during high-speed XY movement or continuous scanning eliminating manual intervention.
  • Automated lens changer: Linear lens changer allows fast, accurate switching between magnifications, fully controlled via software or integrated with the autofocus system.
  • Advanced illumination: Expanded lighting options with programmable and standard modules, supporting multiple operating modes and wavelengths from Visible to SWIR for various substrates.
  • Broad laser compatibility: Compatible with YAG lasers from Near-Ultraviolet (NUV) to Near-Infrared (NIR), supporting applications like automated cutting, trimming, and photomask repair.
  • Multi-camera observation: Dual-camera support enables seamless multi-scale viewing and inspection.
  • Compact and rigid design: Retains the Mitutoyo Video Microscope Unit’s (VMU) compact, lightweight form while integrating robust automation hardware for easy OEM integration and inspection.

Applications

  • Automated Optical Inspections (AOI)
  • Semiconductor and MEMS device inspection
  • LCD thin-film and silicon board thickness measurement
  • Automated laser peeling, cutting, and defect repair
  • Cellular and micro-fluidic analysis