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Mitutoyo VMU and WDI MMS Integration

WDI designs and manufactures cutting-edge automated microscopes and precision components tailored for demanding inspection applications. By integrating Mitutoyo’s VMU (Video Microscope Unit), WDI has transformed automation technology into a fully automated, high-throughput inspection and laser processing unified system. The native capabilities of VMU are now expanded by WDI’ integration of precision Z-stages, high-speed laser autofocus sensor, fast linear lens changers, and illuminator options.

 

Brochure (Coming Soon)

Features

  • High-precision motorized Z-stage: Integrated Z-axis enables smooth, programmable vertical movement with up to 40 nm resolution for precise, automated focus control.
  • Dynamic laser autofocus sensor: Tracks surface variations in real time, automatically adjusting focus during high-speed XY movement or continuous scanning eliminating manual intervention.
  • Automated lens changer: Linear lens changer allows fast, accurate switching between magnifications, fully controlled via software or integrated with the autofocus system.
  • Advanced illumination: Expanded lighting options with programmable and standard modules, supporting multiple modes and wavelengths from visible to SWIR for imaging difficult substrates.
  • Broad laser compatibility: Compatible with YAG lasers from NUV to NIR, supporting applications like automated cutting, trimming, and photomask repair.
  • Multi-camera observation: Dual-camera support enables seamless multi-scale viewing and inspection within automated workflows.
  • Compact and rigid design: Retains the VMU’s compact, lightweight form while integrating robust automation hardware for easy OEM and inspection system integration.

Applications

  • Automated Optical Inspections (AOI)
  • High-throughput semiconductor and MEMS device inspection
  • LCD thin-film and silicon board thickness measurement
  • Automated laser peeling, cutting, and defect repair
  • Cellular and micro-fluidic analysis